Volume number2012
非接触微細形状計測シ...

非接触微細形状計測システム白色光干渉計搭載型画像測定機QV-WLI、及びPFF

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非接触微細形状計測システム白色光干渉計搭載型画像測定機QV-WLI、及びPFF

Call No. (NDL)
Z74-F452
Bibliographic ID of National Diet Library
025620221
Material type
記事
Author
真家 洋武ほか
Publisher
東京 : 日本光学測定機工業会
Publication date
2012
Material Format
Paper
Journal name
光計測シンポジウム論文集 2012
Publication Page
p.42-44
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Paper

Material Type
記事
Author/Editor
真家 洋武
浅野 秀光
長濱 龍也 他
Alternative Title
Non-contact minute form measurement system White Light Interferometer mounted vision measuring machine QV-WLI, and PFF
Periodical title
光計測シンポジウム論文集
No. or year of volume/issue
2012
Pages
42-44
Publication date of volume/issue (W3CDTF)
2012
Publication (Periodical Title)
東京 : 日本光学測定機工業会