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雑誌光計測シンポジウム論文集
Volume number2012
Article直線状波数走査干渉計...

直線状波数走査干渉計による薄膜形状測定

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直線状波数走査干渉計による薄膜形状測定

Call No. (NDL)
Z74-F452
Bibliographic ID of National Diet Library
025620228
Material type
記事
Author
佐々木 修己ほか
Publisher
東京 : 日本光学測定機工業会
Publication date
2012
Material Format
Paper
Journal name
光計測シンポジウム論文集 2012
Publication Page
p.49-52
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Paper

Material Type
記事
Title
直線状波数走査干渉計による薄膜形状測定
Author/Editor
佐々木 修己
平久保 智之
崔 森悦 他
Author Heading
佐々木 修己
平久保 智之
崔 森悦
Alternative Title
A linear wavenumber-scanning interferometer for profile measurement of a thin film
Periodical title
光計測シンポジウム論文集
No. or year of volume/issue
2012
Pages
49-52
Publication date of volume/issue (W3CDTF)
2012
Publication (Periodical Title)
東京 : 日本光学測定機工業会