Volume number2013
光学式の表面性状測定...

光学式の表面性状測定機を対象としたFDTD法による基本形状に対する応答解析

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光学式の表面性状測定機を対象としたFDTD法による基本形状に対する応答解析

Call No. (NDL)
Z74-F452
Bibliographic ID of National Diet Library
025620817
Material type
記事
Author
藤井 章弘ほか
Publisher
東京 : 日本光学測定機工業会
Publication date
2013
Material Format
Paper
Journal name
光計測シンポジウム論文集 2013
Publication Page
p.13-16
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Paper

Material Type
記事
Author/Editor
藤井 章弘
林 真市
藤井 信太郎
Alternative Title
Analytical study on optically measured surface profiles of referential geometryusing a FDTD method
Periodical title
光計測シンポジウム論文集
No. or year of volume/issue
2013
Pages
13-16
Publication date of volume/issue (W3CDTF)
2013
Publication (Periodical Title)
東京 : 日本光学測定機工業会