ナノスケール幾何標準 (特集 物理標準と精密工学)
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- Material Type
- 記事
- Title
- Author/Editor
- 菅原 健太郎三隅 伊知子権太 聡
- Series Title
- Alternative Title
- Nanoscale Standards
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 80(7)=955:2014.7
- Volume
- 80
- Issue
- 7