エアロゾル充填によるセンサ用マイクロ熱電変換素子の高熱抵抗化
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- Material Type
- 記事
- Author/Editor
- 壷井 修高馬 悟覚西野 琢也
- Alternative Title
- Micro Thermoelectric Generators Having High Thermal-Resistance for Wireless Sensor Nodes Made by Aerosol Mold-Filling
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 134(7):2014.7
- Volume
- 134
- Issue
- 7
- Pages
- 218-223