デスクトップ型DRIE装置を用いたチタニウム製マイクロ構造体の作製

Journal name: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 30:2013.11.5-7

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Material Type: 記事
Title: デスクトップ型DRIE装置を用いたチタニウム製マイクロ構造体の作製
Author/Editor: 山田周史
加勢彩乃
寒川雅之他
Author Heading: 山田周史
加勢彩乃
寒川雅之
Alternative Title: Fabrication of titanium microstructure using a desktop DRIE equipment
Periodical title: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編]
No. or year of volume/issue: 30:2013.11.5-7
Volume: 30
Pages: 1-5
Publication date of volume/issue (W3CDTF): 2013-11
Publication (Periodical Title): [東京] : Institute of Electrical Engineers of Japan
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: チタニウム
深掘反応性イオンエッチング
F系ガス
MEMS
バイオミメティクス
Titanium
DRIE
Fluorine gas
Biomimetics
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: YH247-299
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025704790
http://id.ndl.go.jp/bib/025704790
Bibliographic Record Category (NDL): 632