パルス電流印加ゲート構成によるFET水素センサの応答特性の高速化
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- Material Type
- 記事
- Author/Editor
- 奥井 貴博牛田 祐貴武市 修蔵 他
- Alternative Title
- FET Hydrogen Sensor by Direct Heating of Platinum Metal Gate for Fast Response Time
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 134(8):2014.8
- Volume
- 134
- Issue
- 8
- Pages
- 264-269