イオン注入に立脚した難加工性材料の超精密剥離技術の開発

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Material Type: 記事
Title: イオン注入に立脚した難加工性材料の超精密剥離技術の開発
Author/Editor: 岩田博之
Author Heading: 岩田博之
Alternative Title: Development of Ultra-Precision Exfoliation Technology for Hard-to-Process Materials
Periodical title: 愛知工業大学総合技術研究所研究報告 / 研究報告編集委員会編
No. or year of volume/issue: (16):2014.9
Issue: 16
Pages: 19-22
Publication date of volume/issue (W3CDTF): 2014-09
ISSN (Periodical Title): 1344-9672
ISSN-L (Periodical Title): 1344-9672
Publication (Periodical Title): 豊田 : 愛知工業大学総合技術研究所
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-B826
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025822256
http://id.ndl.go.jp/bib/025822256
Bibliographic Record Category (NDL): 632