Control of residual stress in thin films by substrate vibration and their mechanical property

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Material Type: 記事
Title: Control of residual stress in thin films by substrate vibration and their mechanical property
Author/Editor: Akihito Matsumuro
Makoto Takagi
Author Heading: Akihito Matsumuro
Makoto Takagi
Periodical title: 愛知工業大学総合技術研究所研究報告 / 研究報告編集委員会編
No. or year of volume/issue: (16):2014.9
Issue: 16
Pages: 71-75
Publication date of volume/issue (W3CDTF): 2014-09
ISSN (Periodical Title): 1344-9672
ISSN-L (Periodical Title): 1344-9672
Publication (Periodical Title): 豊田 : 愛知工業大学総合技術研究所
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-B826
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025822535
http://id.ndl.go.jp/bib/025822535
Bibliographic Record Category (NDL): 632