Czシリコン単結晶の凝固プロセス中に水素を添加することで達成できるプロセスゾーンの拡大 (ミニ特集 材料の高強度化・高機能化を実現する凝固プロセス技術と解析技術の最前線)
Digital data available(Japan Link Center)
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 杉村 渉小野 敏昭宝来 正隆 他
- Series Title
- Alternative Title
- The Effects of Hydrogen Doping on Expansion of a Process Zone of Cz Silicon Single Crystals
- Periodical title
- まてりあ = Materia Japan
- No. or year of volume/issue
- 53(10):2014.10
- Volume
- 53
- Issue
- 10