Czシリコン単結晶の凝固プロセス中に水素を添加することで達成できるプロセスゾーンの拡大 (ミニ特集 材料の高強度化・高機能化を実現する凝固プロセス技術と解析技術の最前線)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 杉村 渉小野 敏昭宝来 正隆 他
- Series Title
- Alternative Title
- The Effects of Hydrogen Doping on Expansion of a Process Zone of Cz Silicon Single Crystals
- Periodical title
- まてりあ = Materia Japan
- No. or year of volume/issue
- 53(10):2014.10
- Volume
- 53
- Issue
- 10