水酸化フラーレンを用いたCu化学機械研磨特性と加工メカニズム解析 (特集化学機械研磨の最新技術)

水酸化フラーレンを用いたCu化学機械研磨特性と加工メカニズム解析

(特集化学機械研磨の最新技術)

Journal name: トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会編 59(12):2014

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Material Type: 記事
Title: 水酸化フラーレンを用いたCu化学機械研磨特性と加工メカニズム解析
Author/Editor: 高谷裕浩
道畑正岐
林照剛
Series Title: 特集化学機械研磨の最新技術
Author Heading: 高谷裕浩
道畑正岐
林照剛
Alternative Title: Polishing Performance and Mechanism for Copper Surface CMP Using Water-Soluble Fullerenol
Periodical title: トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会編
No. or year of volume/issue: 59(12):2014
Volume: 59
Issue: 12
Pages: 765-772
Publication date of volume/issue (W3CDTF): 2014
ISSN (Periodical Title): 0915-1168
ISSN-L (Periodical Title): 0915-1168
Publication (Periodical Title): 東京 : 日本トライボロジー学会 ; 1989-
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: water-soluble fullerenol
Cu-CMP
high flatness
material removal rate
functional molecular abrasive
chemical effect
complex brittle layer
surface-enhanced Raman scattering
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-540
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025983956
http://id.ndl.go.jp/bib/025983956
Bibliographic Record Category (NDL): 632