Three Dimensional Nanometer/Micrometer Scale Bridge Construction Using Two-tone Photopatterning of Thin Niobium Complex Films

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Material Type: 記事
Title: Three Dimensional Nanometer/Micrometer Scale Bridge Construction Using Two-tone Photopatterning of Thin Niobium Complex Films
Author/Editor: Hitoshi ENDO
Osamu TAKAI
Hideo HONMA 他
Author Heading: Hitoshi ENDO
Osamu TAKAI
Hideo HONMA
Periodical title: 材料の科学と工学 : 日本材料科学会誌
No. or year of volume/issue: 51(6)=294:2014
Volume: 51
Issue: 6
Sequential issue number: 294
Pages: 247-250
Publication date of volume/issue (W3CDTF): 2014
ISSN (Periodical Title): 1347-4774
ISSN-L (Periodical Title): 1347-4774
Publication (Periodical Title): 東京 : 日本材料科学会 ; 2002-
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: photopatterning
niobium oxide
3D pattern
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-778
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026003020
http://id.ndl.go.jp/bib/026003020
Bibliographic Record Category (NDL): 632