Volume number9号 2014年
スパッタ法によるチタ...

スパッタ法によるチタン酸バリウム薄膜の作製と評価

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スパッタ法によるチタン酸バリウム薄膜の作製と評価

Call No. (NDL)
Z74-F208
Bibliographic ID of National Diet Library
026003761
Material type
記事
Author
菅沼 幸男ほか
Publisher
長野 : 長野県工業技術総合センター
Publication date
2014
Material Format
Paper
Journal name
長野県工業技術総合センター研究報告 (9):2014
Publication Page
p.63-65
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Paper

Material Type
記事
Author/Editor
菅沼 幸男
水嵜 英明
米久保 荘 他
Alternative Title
Deposition and Evaluation of Barium Titanate Thin Films Using Sputtering
Periodical title
長野県工業技術総合センター研究報告
No. or year of volume/issue
(9):2014
Issue
9
Pages
63-65
Publication date of volume/issue (W3CDTF)
2014