高精度プレス焼結によるシリコン・炭素複合厚膜の創製
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- Material Type
- 記事
- Author/Editor
- 城所 貴博閻 紀旺
- Alternative Title
- High-precision press sintering for porous silicon-carbon conposite thick films
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 59(1)=389:2015.1
- Volume
- 59
- Issue
- 1
- Sequential issue number
- 389