表面トポグラフィ測定のための光学式輪郭測定技術の最近の動向 (特集 表面粗さに関する最近の動向)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 深津 拡也中村 研人伊藤 聡史
- Series Title
- Alternative Title
- Recent Trends in Optical Profiling Techniques for Surface Topography
- Periodical title
- トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
- No. or year of volume/issue
- 60(1):2015
- Volume
- 60
- Issue
- 1