ダウンサイジングとロバスト性がもたらすデジタル干渉計の普及"ZYGO Miniシリーズ" (特集計測技術にみる時代はダウンサイジング)

ダウンサイジングとロバスト性がもたらすデジタル干渉計の普及"ZYGO Miniシリーズ"

(特集計測技術にみる時代はダウンサイジング)

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Material Type: 記事
Title: ダウンサイジングとロバスト性がもたらすデジタル干渉計の普及"ZYGO Miniシリーズ"
Author/Editor: 鈴木秀和
Series Title: 特集計測技術にみる時代はダウンサイジング
Author Heading: 鈴木秀和
Periodical title: O plus E : Optics + electronics
No. or year of volume/issue: 37(3)=424:2015.3
Volume: 37
Issue: 3
Sequential issue number: 424
Pages: 173-176
Publication date of volume/issue (W3CDTF): 2015-03
ISSN (Periodical Title): 0911-5943
ISSN-L (Periodical Title): 0911-5943
Publication (Periodical Title): 東京 : アドコム・メディア
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1465
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026183544
http://id.ndl.go.jp/bib/026183544
Bibliographic Record Category (NDL): 632