ナノポーラスSiO₂を用いた高耐熱エレクトレットの開発および振動発電デバイスへの応用 (特集 平成26年度「センサ・マイクロマシン部門総合研究会」)
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- Material Type
- 記事
- Author/Editor
- 鈴木 昌人高橋 智一青柳 誠司
- Series Title
- Alternative Title
- Development of Nano-porous SiO₂ Electret with High Thermal Resistance and Its Application to Vibration Energy Harvester
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 135(5):2015.5
- Volume
- 135
- Issue
- 5