反応性プラズマにおけるシリコンクラスター・ナノ粒子形成 (小特集 シリコン系太陽電池の高効率化に向けたプラズマCVDの科学 ; 気相の物理・化学)
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- Material Type
- 記事
- Author/Editor
- 古閑 一憲白谷 正治
- Series Title
- Alternative Title
- Formation of Silicon Clusters and Nanoparticles in Reactive Plasmas
- Periodical title
- プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
- No. or year of volume/issue
- 91(5):2015.5
- Volume
- 91
- Issue
- 5