集積回路上へのBST薄膜可変容量とAuめっき厚膜インダクタのモノリシック集積化
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- Material Type
- 記事
- Author/Editor
- 浅野 翔Ramesh PokharelAwinash Anand 他
- Author Heading
- Alternative Title
- Monolithic Integration of BST Thin Film Varactors and Au Electroplated Thick Film Inductors above IC
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 135(8):2015.8
- Volume
- 135
- Issue
- 8
- Pages
- 323-329