大気圧電子顕微鏡AS...

大気圧電子顕微鏡ASEMによる水中観察法の開発 : 半導体の超薄膜技術とバイオ顕微鏡の融合研究

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大気圧電子顕微鏡ASEMによる水中観察法の開発 : 半導体の超薄膜技術とバイオ顕微鏡の融合研究

Call No. (NDL)
Z74-F693
Bibliographic ID of National Diet Library
026684369
Material type
記事
Author
小椋 俊彦ほか
Publisher
[つくば] : 産業技術総合研究所
Publication date
2015-08
Material Format
Paper
Journal name
Synthesiology = 構成学 / シンセシオロジー編集委員会 編 8(3):2015.8
Publication Page
p.116-126
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Paper Digital

Material Type
記事
Author/Editor
小椋 俊彦
西山 英利
須賀 三雄 他
Alternative Title
Development of an in-solution observation method using atmospheric scanning electron microscopy (ASEM) : Interdisciplinary research between semiconductor fabrication technology and biological electron microscopy
Periodical title
Synthesiology = 構成学 / シンセシオロジー編集委員会 編
No. or year of volume/issue
8(3):2015.8
Volume
8
Issue
3
Pages
116-126