シリコン単結晶間のマ...

シリコン単結晶間のマイクロトライボロジー

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シリコン単結晶間のマイクロトライボロジー

Call No. (NDL)
Z17-314
Bibliographic ID of National Diet Library
026781120
Material type
記事
Author
高木 誠ほか
Publisher
仙台 : 日本金属学会 ; 1937-
Publication date
2015-10
Material Format
Paper
Journal name
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials 79(10):2015.10
Publication Page
p.504-510
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Paper Digital

Material Type
記事
Author/Editor
高木 誠
水流 一平
岩田 博之 他
Alternative Title
Microtribology between Single Crystals of Silicon
Periodical title
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
No. or year of volume/issue
79(10):2015.10
Volume
79
Issue
10
Pages
504-510