今さら聞けない? 測定・制御のコツ洗浄技術のコツ : Si表面のウェット洗浄

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Material Type: 記事
Title: 今さら聞けない? 測定・制御のコツ洗浄技術のコツ : Si表面のウェット洗浄
Author/Editor: 有馬健太
Author Heading: 有馬健太
Alternative Title: Tips for cleaning techniques : Focusing on wet cleaning of Si surfaces
Periodical title: 応用物理
No. or year of volume/issue: 84(11):2015.11
Volume: 84
Issue: 11
Pages: 1009-1012
Publication date of volume/issue (W3CDTF): 2015-11
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: wet cleaning
semiconductor process
semiconductor surface
passivation
RCA cleaning
water
wetting
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026839993
http://id.ndl.go.jp/bib/026839993
Bibliographic Record Category (NDL): 632