Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 生井 準人杉田 光日城 良樹 他
- Alternative Title
- Application of Self-Assembly Materials to Semiconductor Patterning
- Periodical title
- JSRテクニカルレビュー = JSR technical review / JSR株式会社研究開発部 編
- No. or year of volume/issue
- (119):2012.3
- Issue
- 119
- Pages
- 7-13
- Publication date of volume/issue (W3CDTF)
- 2012-03