Reverse Lift-Off Process and Application for Cu-Zr-Ti Metallic Glass Thick Film Structures (Special Issue on Micro-Nano Materials and Processing)
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- Material Type
- 記事
- Author/Editor
- Shigetaka WatanabeJunpei SakuraiMizue Mizoshiri 他
- Author Heading
- Periodical title
- International journal of automation technology
- No. or year of volume/issue
- 9(6)=50:2015.11
- Volume
- 9
- Issue
- 6
- Sequential issue number
- 50