テラヘルツ放射顕微鏡開発の最近の進展と産業応用の可能性

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Material Type: 記事
Title: テラヘルツ放射顕微鏡開発の最近の進展と産業応用の可能性
Author/Editor: 斗内政吉
Author Heading: 斗内政吉
Alternative Title: Recent progress on the development of a laser terahertz emission microscope and its prospects for industrial applications
Periodical title: 応用物理
No. or year of volume/issue: 84(12):2015.12
Volume: 84
Issue: 12
Pages: 1101-1106
Publication date of volume/issue (W3CDTF): 2015-12
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: terahertz emission microscope
terahertz emission spectroscopy
LTEM
DTEM
LSI default localization
solar cell evaluation
wide gap semiconductor evaluation
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026971814
http://id.ndl.go.jp/bib/026971814
Bibliographic Record Category (NDL): 632