New getting method for thinned Si using gas cluster ion beam

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New getting method for thinned Si using gas cluster ion beam

Call No. (NDL)
Z74-E130
Bibliographic ID of National Diet Library
026978468
Material type
記事
Author
Noriaki Toyodaほか
Publisher
姫路 : 兵庫県立大学工学研究科イオン工学研究室
Publication date
2012
Material Format
Paper
Journal name
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo 2012年度
Publication Page
p.27-29
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Paper

Material Type
記事
Author/Editor
Noriaki Toyoda
Isao Yamada
Periodical title
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo
No. or year of volume/issue
2012年度
Pages
27-29
Publication date of volume/issue (W3CDTF)
2012
Publication (Periodical Title)
姫路 : 兵庫県立大学工学研究科イオン工学研究室
Place of Publication (Country Code)
JP