Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 小尻 尚志諏訪 智之橋本 圭市 他
- Series Title
- Alternative Title
- Fabrication of FinFET Structure with High Selectivity Etching Using Newly Developed SiNx Etch Gas
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 115(363):2015.12.14
- Volume
- 115
- Issue
- 363