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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- Takashi INAMIKunihiro TAMAHASHITakashi NAMEKAWA 他
- Author Heading
- Alternative Title
- 銅微細配線の配線底部における結晶粒径分布 ドウ ビサイ ハイセン ノ ハイセン テイブ ニ オケル ケッショウ リュウケイ ブンプ
- Periodical title
- 電気化学および工業物理化学 = Denki kagaku
- No. or year of volume/issue
- 84(3):2016.3
- Volume
- 84
- Issue
- 3
- Pages
- 151-155