微細パターン形成に適する新規マンガンめっき浴の開発
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 依田 稔久近藤 人資是津 信行手嶋 勝弥
- Alternative Title
- Development of Manganese Plating Bath Suitable for the Fine Pattern Formation
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 67(4):2016.4
- Volume
- 67
- Issue
- 4
- Pages
- 211-216