走査型プローブ顕微鏡によるサファイア基板上窒化ガリウム層の表面形状及び表面電位観測
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- Material Type
- 記事
- Author/Editor
- 潤間 威史佐藤 宣夫石川 博康
- Alternative Title
- Surface Potential and Topography Measurements of Gallium Nitride on Sapphire by Scanning Probe Microscopy
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 136(4):2016.4
- Volume
- 136
- Issue
- 4
- Pages
- 96-101