Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Title
- Series Title
- Alternative Title
- Ion Implantation System
- Periodical title
- 日新電機技報 = The Nissin electric review : 日新電機グループ技術論文誌
- No. or year of volume/issue
- 61(1)=145:2016
- Volume
- 61
- Issue
- 1
- Sequential issue number
- 145
- Pages
- 21-23