時間応答性の異なる検知部を集積したマイクロカンチレバー型触覚センサの基礎検討

Journal name: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 32:2015.10.28-30

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Material Type: 記事
Title: 時間応答性の異なる検知部を集積したマイクロカンチレバー型触覚センサの基礎検討
Author/Editor: 河野壮
三原雅人
安部隆
奥山雅則
野間春生
寒川雅之
Author Heading: 河野壮
三原雅人
安部隆
奥山雅則
野間春生
寒川雅之
Alternative Title: Characterization of BiFeO₃ thin film for tactile sensor using microcantilevers with piezoelectric capacitor and strain-gauge
Periodical title: 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編]
No. or year of volume/issue: 32:2015.10.28-30
Volume: 32
Pages: 1-4
Publication date of volume/issue (W3CDTF): 2015-10
Publication (Periodical Title): [東京] : Institute of Electrical Engineers of Japan
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 触覚センサ
BiFeO₃
圧電体薄膜
カンチレバー
Tactile sensor
Piezoelectric thin film
Cantilever
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: YH247-299
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 027427286
http://id.ndl.go.jp/bib/027427286
Bibliographic Record Category (NDL): 632