Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 村田 祐貴南 佑人寒川 雅之安部 隆
- Alternative Title
- Thermal Reactive Ion Etching of Titanium Using a Self-heated Stage and Its Optimization
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 32:2015.10.28-30
- Volume
- 32
- Pages
- 1-5
- Publication date of volume/issue (W3CDTF)
- 2015-10