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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 宮澤 哲史大河 正志佐藤 孝
- Alternative Title
- FEM Analysis on Sensor Sensitivity in a Silicon-Based Guided-Wave Optical Accelerometer : Sensitivity Dependences on Waveguide Position and Diaphragm Thickness
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 32:2015.10.28-30
- Volume
- 32
- Pages
- 1-4
- Publication date of volume/issue (W3CDTF)
- 2015-10