接触力・光・温度を測...

接触力・光・温度を測るMEMSコンボセンサと物体の質感計測 (特集 独創的計測・分析技術の開発)

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接触力・光・温度を測るMEMSコンボセンサと物体の質感計測

(特集 独創的計測・分析技術の開発)

Call No. (NDL)
Z17-54
Bibliographic ID of National Diet Library
027560538
Material type
記事
Author
寒川 雅之
Publisher
東京 : 小峰工業出版
Publication date
2016-08
Material Format
Paper
Journal name
化學工業 67(8)=798:2016.8
Publication Page
p.608-615
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Paper

Material Type
記事
Author/Editor
寒川 雅之
Author Heading
Alternative Title
A MEMS Combo Sensor with Sensitivity to Multi-axial Force, Light, and Temperature
Periodical title
化學工業
No. or year of volume/issue
67(8)=798:2016.8
Volume
67
Issue
8