雑誌愛知工業大学総合技術研究所研究報告
Volume number18号 2016年9月
ArticleSiCウェハ内部のパ...

SiCウェハ内部のパルスレーザ照射痕の観察

Icons representing 記事

SiCウェハ内部のパルスレーザ照射痕の観察

Call No. (NDL)
Z74-B826
Bibliographic ID of National Diet Library
027659600
Material type
記事
Author
岩田 博之ほか
Publisher
豊田 : 愛知工業大学総合技術研究所
Publication date
2016-09
Material Format
Paper
Journal name
愛知工業大学総合技術研究所研究報告 / 研究報告編集委員会 編 (18):2016.9
Publication Page
p.37-41
View All

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    Paper
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
    Check the holdings of this book

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
記事
Title
SiCウェハ内部のパルスレーザ照射痕の観察
Author/Editor
岩田 博之
河口 大祐
坂 公恭
Author Heading
岩田 博之
河口 大祐
坂 公恭
Alternative Title
Trial study of SiC dicing induced by laser
Periodical title
愛知工業大学総合技術研究所研究報告 / 研究報告編集委員会 編
No. or year of volume/issue
(18):2016.9
Issue
18
Pages
37-41
Publication date of volume/issue (W3CDTF)
2016-09