固定砥粒による無歪み...

固定砥粒による無歪み研削(CMG)技術とシリコンウエハの薄片化加工 (特集 先端部品と求められる精密研磨技術の最新動向 ; 最新の注目技術)

Icons representing 記事

固定砥粒による無歪み研削(CMG)技術とシリコンウエハの薄片化加工

(特集 先端部品と求められる精密研磨技術の最新動向 ; 最新の注目技術)

Call No. (NDL)
Z16-392
Bibliographic ID of National Diet Library
027670465
Material type
記事
Author
周 立波
Publisher
東京 : 日刊工業新聞社
Publication date
2016-10
Material Format
Paper
Journal name
機械技術 = Mechanical engineering 64(11)=824:2016.10
Publication Page
p.54-57
View All

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
記事
Author/Editor
周 立波
Author Heading
Periodical title
機械技術 = Mechanical engineering
No. or year of volume/issue
64(11)=824:2016.10
Volume
64
Issue
11
Sequential issue number
824