金属援用エッチングによるポーラスシリコンの形成と光学特性評価 (小特集 アノード酸化の新展開)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 八重 真治
- Series Title
- Author Heading
- Alternative Title
- Porous Silicon Produced by Metal-Assisted Etching : Structure Control and Optical Property
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 67(10):2016.10
- Volume
- 67
- Issue
- 10