PZT系単結晶薄膜を用いた圧電MEMSのためのYSZエピタキシャルバッファ層のウエハレベルスパッタ成膜
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- Material Type
- 記事
- Author/Editor
- 西澤 信典吉田 慎哉和佐 清孝田中 秀治
- Alternative Title
- Sputter Deposition of YSZ Epitaxial Buffer Layer at Wafer Level for Piezoelectric MEMS Utilizing PZT-based Monocrystalline Thin Film
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 136(10):2016.10
- Volume
- 136
- Issue
- 10
- Pages
- 437-442