平行デュアルレーザビーム法によるシリコンウェーハのバルクキャリア寿命評価技術 (電子デバイス 半導体電力変換合同研究会 パワーデバイス・パワーエレクトロニクスとその実装技術)
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- Material Type
- 記事
- Author/Editor
- 金田 寛大村 一郎
- Series Title
- Alternative Title
- Dual laser beam technique to evaluate bulk lifetime of free carriers in silicon wafers
- Periodical title
- 電気学会研究会資料. EDD = The papers of technical meeting on electron devices, IEE Japan / 電子デバイス研究会 [編]
- No. or year of volume/issue
- 2016(63-77):2016.11.15
- Volume
- 2016
- Issue
- 63-77