レプリカ法による微小穴形状の解析 : 研削加工で形成したガラス穴の測定と解析

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レプリカ法による微小穴形状の解析 : 研削加工で形成したガラス穴の測定と解析

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
028024250
Material type
記事
Author
小川 昭ほか
Publisher
東京 : 砥粒加工学会
Publication date
2017-03
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 61(3)=415:2017.3
Publication Page
p.151-153
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Paper Digital

Material Type
記事
Author/Editor
小川 昭
高橋 武則
樋口 英一
Alternative Title
Analysis of small holes using the replica method : Measurement and analysis of inner feature of glass hole made by grinding
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
61(3)=415:2017.3
Volume
61
Issue
3
Sequential issue number
415