雑誌兵庫県立大学工学研究科イオン工学研究室論文集
Volume number2013年度-2014年度
ArticleCu Pattern...

Cu Pattern Etching by Oxygen Gas Cluster Ion Beams with Acetic Acid Vapor

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Cu Pattern Etching by Oxygen Gas Cluster Ion Beams with Acetic Acid Vapor

Call No. (NDL)
Z74-E130
Bibliographic ID of National Diet Library
028116860
Material type
記事
Author
N. Toyodaほか
Publisher
姫路 : 兵庫県立大学工学研究科イオン工学研究室
Publication date
2014
Material Format
Paper
Journal name
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo 2014年度
Publication Page
p.19-21
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Paper

Material Type
記事
Title
Cu Pattern Etching by Oxygen Gas Cluster Ion Beams with Acetic Acid Vapor
Author/Editor
N. Toyoda
M. Kojima
R. Hinoura
A. Yamaguchi
K. Hara
I. Yamada
Author Heading
N. Toyoda
M. Kojima
R. Hinoura
A. Yamaguchi
K. Hara
I. Yamada
Periodical title
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo
No. or year of volume/issue
2014年度
Pages
19-21
Publication date of volume/issue (W3CDTF)
2014
Publication (Periodical Title)
姫路 : 兵庫県立大学工学研究科イオン工学研究室
Place of Publication (Country Code)
JP