触媒化学気相堆積(Cat-CVD)法による太陽電池用高品質パッシベーション膜の形成 (特集 薄膜成長の最前線)
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- Material Type
- 記事
- Author/Editor
- 大平 圭介Trinh Cham THI及川 貴史瀨戸 純一小山 晃一松村 英樹
- Series Title
- Alternative Title
- Formation of High-Quality Passivation Films for Solar Cells by Cat-CVD
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 38(5):2017.5
- Volume
- 38
- Issue
- 5