両面同時研磨における上定盤研磨パッド表面性状測定装置の開発と研磨特性の評価
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- Material Type
- 記事
- Author/Editor
- 畝田 道雄早川 光祐澁谷 和孝中村 由夫市川 大造石川 憲一
- Alternative Title
- Development of measurement device for polishing pad surface asperity on the upper platen of a double-sided polisher and its application for evaluation of polishing characteristics
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 61(7)=419:2017.7
- Volume
- 61
- Issue
- 7
- Sequential issue number
- 419