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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 齋藤 太朗小野 翔太郎伊庭 竜太安井 寛治
- Series Title
- Alternative Title
- Monomolecular layer growth control of ZnO films by pulse supply of a metal source gas in catalytic reaction-assisted chemical vapor deposition
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 117(148):2017.7.21・22
- Volume
- 117
- Issue
- 148