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シリコンレゾナント高感度ひずみセンサ

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シリコンレゾナント高感度ひずみセンサ

Call No. (NDL)
Z16-328
Bibliographic ID of National Diet Library
028447546
Material type
記事
Author
鮫島 健ほか
Publisher
武蔵野 : 横河電機マーケティング本部
Publication date
2017
Material Format
Paper
Journal name
横河技報 = Yokogawa technical report 60(1)=248:2017
Publication Page
p.43-47
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Paper

Material Type
記事
Author/Editor
鮫島 健
鈴木 良孝
濱松 伸到
横内 裕
吉田 隆司
Alternative Title
High-sensitivity Silicon Resonant Strain Sensor
Periodical title
横河技報 = Yokogawa technical report
No. or year of volume/issue
60(1)=248:2017
Volume
60
Issue
1
Sequential issue number
248