銅配線上への無電解パラジウム/金めっきに及ぼす脱脂処理およびソフトエッチング処理の影響
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 加藤 友人寺島 肇渡邊 秀人渡邊 充広本間 英夫高井 治
- Alternative Title
- Influence of Cleaning and Soft Etching for Electroless Palladium/Gold Plating on Copper Fine Pattern
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 68(8):2017.8
- Volume
- 68
- Issue
- 8
- Pages
- 455-461