静電型エナジーハーベスクのためのNdFeB薄膜磁石を用いたギャップ制御機構 (特集 磁気センサ・アクチュエータ材料とその応用)
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- Material Type
- 記事
- Author/Editor
- 吉井 真一山口 晃平藤田 孝之神田 健介前中 一介
- Series Title
- Alternative Title
- Gap Control Structure Using NdFeB Thin-Film Magnet for Electrostatic Energy Harvester
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 137(8):2017.8
- Volume
- 137
- Issue
- 8