生産規模でのプラズマイオン成膜プロセスの比較(小特集高電力パルススパッタ(HiPIMS))

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Material Type: 記事
Title: 生産規模でのプラズマイオン成膜プロセスの比較
Author/Editor: 廣田悟史
クレーマライナー
高橋哲也
Series Title: 小特集高電力パルススパッタ(HiPIMS)
Author Heading: 廣田悟史
クレーマライナー
高橋哲也
Alternative Title: Comparison of Plasma Ion Deposition Processes at Industrial Scale
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 60(9):2017.9
Volume: 60
Issue: 9
Pages: 362-364
Publication date of volume/issue (W3CDTF): 2017-09
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 028531403
http://id.ndl.go.jp/bib/028531403
Bibliographic Record Category (NDL): 632