Depth analysis of DSPC by SIMS, using gas cluster ion beam

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Depth analysis of DSPC by SIMS, using gas cluster ion beam

Call No. (NDL)
Z63-C795
Bibliographic ID of National Diet Library
028571459
Material type
記事
Author
S. Nakagawaほか
Publisher
Uji : Quantum Science and Engineering Center
Publication date
2012
Material Format
Paper
Journal name
Annual report of Quantum Science and Engineering Center 15:2012.4-2013.3
Publication Page
p.21-23
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Paper

Material Type
記事
Author/Editor
S. Nakagawa
T. Seki
T. Aoki
J. Matsuo
Periodical title
Annual report of Quantum Science and Engineering Center
No. or year of volume/issue
15:2012.4-2013.3
Volume
15
Pages
21-23
Publication date of volume/issue (W3CDTF)
2012
ISSN (Periodical Title)
1345-0700